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| AWM42000 Series Mass flow sensor for gases FEATURES * Ranges 0...25 and 0...1000 sccm1 * Bidirectional sensing * Actual mass flow sensing * Ceramic flow tube * Manifold mount/o-ring sealed SERVICE To be used with dry gases only. The AWM42150VH is a special sensor for hydrogen (H2) flow. The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor. SPECIFICATIONS Maximum ratings Supply voltage2 8 to 15 V typ. 10 0.01 V max. 60 mW ELECTRICAL CONNECTION P1 P2 Power consumption Temperature limits Operating Storage Mechanical shock -40 to 125C -40 to 125C 100 g (5 drops, 6 axes) 123456 Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage November 2004 / 624 1/6 www.sensortechnics.com AWM42000 Series Mass flow sensor for gases FLOW SENSOR CHARACTERISTICS3 VS = 10 0.01 V, TA = 25C Part no. AWM42150VH AWM42300V Flow range (full scale) 2 5 sccm 1 0 0 0 sccm Max. flow ch an g e4 5.0 l/sec 5.0 l/sec Output voltage @ trim point 8.5 1.5 mV @ 25 sccm 54.7 3.7 mV @ 1000 sccm PERFORMANCE CHARACTERISTICS VS = 10 0.01 V, TA = 25C Characteristics Zero offset AWM42150VH AWM42300V Repeatability and hysteresis (combined) Temperature effects5 Offset Span -25 to 85 C -25 to 25 C 25 to 85 C Response time Common mode pressure AWM42150VH AWM42300V Min. -1.0 -1.5 Typ. 0 0 Max. 1.0 1.5 0.35 0.50 Unit mV % reading mV % reading 0.20 2.5 -2.5 1.0 3.0 150 ms p si Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Shift is relative to 25 C. 2/6 November 2004 / 624 www.sensortechnics.com AWM42000 Series Mass flow sensor for gases OUTPUT FLOW VS INTERCHANGEABILITY VS = 10 0.01 V, TA = 25C OUTPUT CURVES November 2004 / 624 3/6 www.sensortechnics.com AWM42000 Series Mass flow sensor for gases HEATER CONTROL CIRCUIT SENSING BRIDGE SUPPLY CIRCUIT Note: Circuits required for operation per specifications. Circuits are not on board the sensor. DIFFERENTIAL INSTRUMENTATION AMPLIFIER CIRCUIT (OPTIONAL) 2 R + R1 R4 (V2 - V1 ) + VOffset VO = 2 R R 1 3 R6 where VOffset = VS R +R 5 6 4/6 November 2004 / 624 www.sensortechnics.com AWM42000 Series Mass flow sensor for gases OUTLINE DRAWING 30.5 (1.20) 27.7 (1.09) 14.0 (0.55) 32.2 (1.19) 7.62 (0.30) 654321 0.64 (0.025) 2.5 (0.10) 34.0 (1.34) 3.0 (0.12) 17.3 (0.68) 10.9 8.4 (0.43) (0.33) O 6.2 (O 0.24) O 3.51 (O 0.138) 4.8 (0.19) O 3.0 (O 0.12) P1 P2 O 2.0 (O 0.08) 2.54 (0.10) 7.9 (0.31) 12.7 (0.50) 123456 mass: approx. 14 g dimensions in mm (inches) November 2004 / 624 5/6 www.sensortechnics.com AWM42000 Series Mass flow sensor for gases GAS CORRECTION FACTORS6 Gas type Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Correction factor (approx.) 0.57 0.77,8 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Notes: 6 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 7 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 8 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. ORDERING INFORMATION Flow range 2 5 sccm 1 0 0 0 sccm Dry gas --AWM42300V Hydrogen gas8 AWM42150VH --- Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 6/6 November 2004 / 624 www.sensortechnics.com |
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